Piezo Nanopositioning Stage

Aerotech's QNP2-100-XYA has a 50 mm x 50 mm clear aperture with closed-loop travels up to 100 µm x 100 µm.

0 October 5, 2016
Staff

Aerotech Piezo Nanopositioning StagesThe Aerotech QNP2 series XY, parallel-kinematic, piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact, low-profile package. The QNP2-100-XYA has a 50 mm x 50 mm clear aperture with closed-loop travels up to 100 µm x 100 µm (open-loop travels to 120 µm x 120 µm). The design is ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy, and other applications where two-sided part access is required. All QNP2 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design directly measures the output of the positioning carriage enabling 0.15 nm resolution, 0.01% linearity, and 1 nm bidirectional repeatability.

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