Linear Encoder

HEIDENHAIN released its LIP 400 series linear encoder system that is compatible with high and ultra high vacuum levels. With an output signal period of 2 microns, and a measuring range of up to 420 mm, the LIP 400 linear encoder series is designed into motion stages. It also has an accuracy grade of either +/- 1 micron, or even +/- 0.5 micron for those applications needing high-end metrology.

The encoder system has a position stability of 2 nanometers and a low cyclical error (or interpolation error) of +/- 20 nanometers. Two different types of glass can be ordered for the scale and scanning unit reticle: a normal float glass with 8 PPM thermal growth or ZERODUR (a 0 PPM thermal growth) glass ceramic for thermal stability considerations. The encoders are made of low outgassing materials, designed for quick pump down times, produced in a clean room environment, and shipped in a nitrogen-flushed custom packaging.
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