Nanopositioning Stage

Aerotech introduced its QFOCUS QF-50 piezo nanopositioning stage, designed for microscope objective and optics positioning. It offers 400μm closed-loop and 450μm open-loop travel, high speed, 0.01% linearity, sub-nanometer resolution, and 4nm bidirectional repeatability. The QF-50 accommodates optical instruments and next-generation laser micromachining applications. The stage is guided by precision flexures optimized using finite element analysis. The QF-50’s flexure bearing design ensures straightness errors to 40nm throughout the entire travel range. Optional closed-loop feedback using a capacitive sensor design allows for sub-nanometer resolution and high linearity. Unlike foil strain gages or piezoresistive sensors, capacitive sensors provide a direct measurement of the positioning carriage for superior accuracy and repeatability. The company’s software provides programming tools including iterative learning control, harmonic cancellation, and command shaping to provide improved tracking errors and faster step-and-settle times. OEM drive options are also available.
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