Microwave self heating sensor chips
State of the Art, Inc. has introduced a line of microwave heater sensor chips using platinum on alumina and oxidized silicon.
Potential applications include determination of thermal resistance of IC chips, variable optical attenuation of arrayed waveguide gratings, and thermal management in miniature chambers (mini-cell arrays). Available with two design options, the TM365 with two thermal sensors in close proximity to the heater for stringent temperature control, and the TM364 single sensor design with moderate temperature control. Both designs with operating temperatures up to 250¬∞C. The self-heating of the sensors is below 4 mW/¬∞C.
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