Design Engineering

Diaphragm Valve

By DE Staff   

Fluid Power Machine Building

Swagelok ALD7 UHP Valve designed to improve semiconductor chip yield.

Swagelok released its ALD7 ultrahighpurity (UHP) diaphragm valve that provides provides better flow consistency, flow capacity, and actuator speed than its ALD6 valve. The valve provides flow capacity up to 0.7 Cv in a 1.5-inch (38.1mm) footprint. According to the company, ALD7 valves deliver precise dosing over tens of millions of ALD (atomic layer deposition) production cycles. The actuator’s open and close response time can be less than 5ms. The actuator is immersible to 150°C (302°F) and the valve body is rated to 200°C (392°F). The ALD7 is available in a modular surface-mount configuration with a high-flow C-seal or in straight configurations with a tube butt weld, and Swagelok VCR face seal fitting end connections.


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