Design Engineering

Linear Axis

By DE Staff   

Automation Electronics Machine Building

ETEL’s TBS Linear Axis provides precision and stability for semiconductor manufacturing equipment.

ETEL released its TBS Linear Axis, a linear axis in one-Degree-Of-Freedom (1-DOF) with ISO 2 rating for cleanrooms. With its incorporated HEIDENHAIN encoder, the TBS can carry up to 45kg of payload. The mechanical bearing is based on an indirect drive linear axis that is controlled by a low cogging servomotor using a dual encoder feedback control scheme. It provides acceleration up to 0.5g with position stability down to ±10nm and bidirectional repeatability of ±0.3um. It has a maximum speed of up to 30mm/s and a maximum acceleration of up to 5m/s2.


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