HEIDENHAIN encoder designed for vacuum applications.
HEIDENHAIN released its LIP 400 series linear encoder system that is compatible with high and ultra high vacuum levels. With an output signal period of 2 microns, and a measuring range of up to 420 mm, the LIP 400 linear encoder series is designed into motion stages. It also has an accuracy grade of either +/- 1 micron, or even +/- 0.5 micron for those applications needing high-end metrology.
The encoder system has a position stability of 2 nanometers and a low cyclical error (or interpolation error) of +/- 20 nanometers. Two different types of glass can be ordered for the scale and scanning unit reticle: a normal float glass with 8 PPM thermal growth or ZERODUR (a 0 PPM thermal growth) glass ceramic for thermal stability considerations. The encoders are made of low outgassing materials, designed for quick pump down times, produced in a clean room environment, and shipped in a nitrogen-flushed custom packaging.