Liquid flow sensor
Sensirion sensor designed for low-volume dosing applications.
Swiss sensor manufacturer Sensirion is launching a flow sensor for flow rates below 2 cc/sec (120 ml/min) with hydrocarbon-based liquids such as photoresists and solvents. Designed for use in high-purity fluid handling applications in the semiconductor, PV and flat panel display industries, the SLQ-QT105 sensor features a short measurement response time of approximately 40 ms and sensitivity for flow rates down to 0.05 cc/sec (3 ml/min). Detection of air bubbles in the microliter range is also possible. Flow is measured without moving parts and non-invasively through the wall of a straight flow path. All wetted materials are made from Teflon or quartz glass. The compact, lightweight device is equipped with fittings for 4x3mm PFA tubing. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.