Linear Piezo Nanopositioning Stage

Aerotech’s QNPHD linear piezo nanopositioning stages provide the benefits of both a stage and actuator in one compact, high-stiffness package. A direct-drive actuation design and optimized structure enable millisecond response and move-and-settle times. The QNPHD offers a 0.03 nm resolution and 0.02% linearity with direct-metrology capacitive sensor option. FEA optimized precision flexures ensure high-stiffness, long device life, and high-dynamics while maintaining excellent geometric performance for critical nanopositioning applications. Optional closed-loop feedback using a unique capacitive sensor design allows for sub-nanometer resolution and single-digit nanometer linearity errors. The closed-loop travels from 10 μm to 40 μm. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability. The QNPHD is available with rear and side cable exit options along with mounting features for both horizontal and vertical orientations. Custom designs and vacuum-prepared versions are available upon request.

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