Precision Hexapod

Aerotech’s HexGen high-load, precision hexapod is ideal for applications in x-ray diffraction, sensor testing, and high-force device manipulation.The HEX500-350HL is actuated with six high-accuracy struts that are built with precision preloaded bearings, ball screws, and drive components. The HEX500-350HL is driven by AC brushless, slotless servomotors that maximize device lifetime and performance. The servomotors are directly coupled to the actuator ball-screw enabling increased drive stiffness, higher positioning accuracy, and better minimum incremental motion (20 nm in XYZ and 0.2 μrad for θxθyθz) when compared to competitive designs that use belts or compliant couplings. The strut pivot-joints are engineered to provide low friction and high stiffness enhancing overall hexapod performance. The platform and base can be easily modified with user-specific features or mounting patterns. The HEX500-350HL is designed with a 150 mm diameter clear aperture in both the platform and base to allow for workpiece access from the bottom. The base is designed with mounting holes to adapt directly to English or metric optical tables. The hexapod can also be vacuum prepared for demanding applications in synchrotron sample or optics adjustment, semiconductor manufacturing and inspection, or satellite sensor testing.

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