Rotary Axis System
ETEL’s DXRH simplifies motion in semiconductor, electronic applications.
ETEL introducted it DXRH rotary axis system which incorporates a 360,000-lines encoder and bearing technology from parent company HEIDENHAIN. The unit also features ETEL’s toothless (ironless), zero torque ripple direct drive technology for high speed stability. The DXRH was designed for the semiconductor industry, and is especially suited for Wafer Process Control applications such as overlay metrology, critical dimension and thin film metrology. The DXRH provides accuracy of ±3 arcsec without calibration, position stability of ± 2.5 marcsec, bidirectional repeatability of ± 0.25 arcsec, and a radial runout of ±1µm. The module is also ISO class 1 clean room compatible.